Photocoupler

ABSTRACT

A photocoupler includes: a support substrate; a MOSFET; a light receiving element; a light emitting element; and a bonding layer. The support substrate includes an insulating layer, input and output terminals. The MOSFET is bonded to the support substrate. The MOSFET has a first surface having an operation region. The light receiving element includes p-n junction and is bonded to the MOSFET. The light receiving element has first and second surfaces. The first surface includes a light reception region, a first electrode, and a second electrode. The light emitting element is connected to the input terminal. The light emitting element has first and second surfaces. The first surface includes first and second electrodes. The second surface has a light emitting region. The bonding layer is configured to bond the light emitting element to the light reception region.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is based upon and claims the benefit of priority fromJapanese Patent Application No. 2013-180163, filed on Aug. 30, 2013; theentire contents of which are incorporated herein by reference.

FIELD

Embodiments described herein relate generally a photocoupler.

BACKGROUND

Photocouplers (including photorelays) convert an input electrical signalinto an optical signal by using a light emitting element; and anelectrical signal can be output by a light receiving element afterreceiving the optical signal. Therefore, the photocoupler can transmitthe electrical signal in a state in which the input and output areinsulated from each other.

In industrial equipment, office equipment, and household appliances,different power supply systems such as a DC voltage system, an AC powersupply system, a telephone line system, a control system, etc., aredisposed inside one device. However, operation errors may occur in thecase where different power supply systems and circuit systems aredirectly coupled.

The operation errors can be suppressed if a photocoupler is used becausethe different power supplies are insulated from each other.

For example, many photocouplers are used in an inverter air conditioneror the like for a load that may be an alternating current load. In thecase where photocouplers are used for signal switching in a testerapplication, an extremely large number of photocouplers are mounted. Insuch a case, it is extremely desirable to reduce the photocoupler sizedue to the need to reduce the mounting surface area on the substrate.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a schematic plan view of a photocoupler according to a firstembodiment, FIG. 1B is a schematic cross-sectional view along line A-A,and FIG. 1C is a schematic cross-sectional view showing a modificationof the input terminal;

FIG. 2A is a schematic side view of the light emitting element, FIG. 2Bis a schematic plan view of the light emitting element, FIG. 2C is aschematic plan view of the light receiving element, FIG. 2D is aschematic cross-sectional view of the stacked structure along line B-B,and FIG. 2E is a schematic side view of the stacked structure;

FIG. 3A is a schematic cross-sectional view of a photocoupler accordingto a first comparative example prior to wire bonding; and FIG. 3B is aschematic cross-sectional view after wire bonding;

FIGS. 4A to 4H are schematic views showing manufacturing processes of anopposed-type photocoupler according to a second comparative example; and

FIG. 5 is a configuration diagram of the photocoupler according to thefirst embodiment.

DETAILED DESCRIPTION

In general, according to one embodiment, a photocoupler includes: asupport substrate; a MOSFET; a light receiving element; a light emittingelement; and a bonding layer. The support substrate includes aninsulating layer, an input terminal, and an output terminal. The MOSFETis bonded to the support substrate. The MOSFET has a first surfacehaving an operation region. The MOSFET includes a drain connected to theoutput terminal. The light receiving element includes p-n junction andis bonded to the MOSFET to be connected to the MOSFET. The lightreceiving element has a first surface and a second surface on a sideopposite to the first surface. The first surface includes a lightreception region, a first electrode, and a second electrode. The secondsurface is insulated from the operation region of the MOSFET. The lightemitting element is connected to the input terminal. The light emittingelement has a first surface and a second surface on a side opposite tothe first surface. The first surface includes a first electrode and asecond electrode. The second surface has a light emitting region ofemitted light. And the bonding layer is configured to bond the lightemitting element to the light reception region of the light receivingelement. The bonding layer is transparent and insulative. The MOSFET isconfigured to switch ON or OFF by photovoltaic power generated in thep-n junction due to the emitted light being irradiated.

Embodiments of the invention will now be described with reference to thedrawings.

FIG. 1A is a schematic plan view of a photocoupler according to a firstembodiment; FIG. 1B is a schematic cross-sectional view along line A-A;and FIG. 1C is a schematic cross-sectional view showing a modificationof the input terminal.

The photocoupler includes a light emitting element 10, a light receivingelement 20, a bonding layer 34, a couple of MOSFET 30, and a supportsubstrate 48.

The support substrate 48 includes an insulating layer 40, inputterminals 50, and output terminals 52. The insulating layer 40 may be abase member such as glass epoxy, etc. The input terminals 50 and theoutput terminals 52 may include a conductive unit provided on the uppersurface of the base member of the insulating layer 40 and a protectivelayer made of a plating layer of Au, Ag, Pd, etc., provided on the frontsurface of the conductive unit.

The MOSFET 30 is bonded to the support substrate 48 and has a firstsurface 30 a that includes operation regions ER and bonding regions MRon the side opposite to the operation regions ER.

The light receiving element 20 is bonded to the bonding regions MR ofthe MOSFET 30 and has a first surface 20 a and a second surface 20 b onthe side opposite to the first surface 20 a, where the first surface 20a includes a light reception region, first electrodes 26 and 29, andsecond electrodes 23 and 27. The second surface 20 b of the lightreceiving element 20 is insulated from the operation regions ER of thefirst surface 30 a of the MOSFET 30.

To insulate the MOSFET 30 from the light receiving element 20, forexample, it is sufficient to provide an insulating layer in the bondingregion MR of the MOSFET 30. Or, it is sufficient to provide aninsulating layer at the second surface 20 b of the light receivingelement 20. Or, it is sufficient to provide an insulative bonding layerbetween the second surface 20 b of the light receiving element 20 andthe bonding regions MR of the first surface 30 a of the MOSFET 30. Or, aconductive shield film that is insulated may be disposed between thesecond surface 20 b of the light receiving element 20 and the bondingregions MR of the first surface 30 a of the MOSFET 30. The conductiveshield film reduces the radiation noise between the chips. Theconductive shield film may have a sheet configuration, may be acontinuous body, may have a scattered island configuration or a lineconfiguration, or may be a combination of these configurations.

Emitted light traveling downward from a light emitting layer is emittedfrom a second surface 10 b of the light emitting element 10.

The bonding layer 34 is transparent and insulative and bonds a secondsurface 10 b of the light emitting element 10 to a light receptionregion 22 of the light receiving element 20.

The light receiving element 20 generates photovoltaic power in the p-njunction of the light reception region due to the light emitted from thelight emitting element 10. The MOSFET 30 has the first surface 30 a thatincludes the operation regions ER and the bonding regions MR provided onthe side opposite to the operation regions ER. The operation regions ERinclude gate electrodes G that are connected to the first electrodes 26and 29 of the light receiving element 20, and source electrodes S thatare connected to the second electrodes 23 and 27 of the light receivingelement 20.

The MOSFET 30 is switched ON or OFF when the photovoltaic power issupplied to the gates of the MOSFET 30. Thus, the photocoupler iscapable of outputting an electrical signal corresponding to the inputelectrical signal.

The input terminals 50 are provided on the bonding region MR side of theMOSFET 30 to be connected respectively to a first electrode 14 and asecond electrode 15 of the light emitting element 10. The outputterminals 52 that are insulated from the input terminals are connectedto the drains D of the MOSFET 30.

The output terminals 52 may include die pad units 52 c that are providedat a first surface 40 a of the insulating layer 40. The MOSFET 30 isbonded to the die pad units 52 c. If the MOSFET is a vertical MOSFET,the structure can be simple because back surfaces 30 b which are thedrains D of the chips can be connected to the die pad units 52 c of theoutput terminals 52.

Each of the input terminals 50 may further include a back surface unit50 a provided at a second surface 40 b of the insulating layer 40 on theside opposite to the first surface 40 a and a side surface unit 50 bprovided at the side surface of the insulating layer 40; and each of theoutput terminals 52 may further include a back surface unit 52 aprovided at the second surface 40 b of the insulating layer 40 on theside opposite to the first surface 40 a and a side surface unit 52 bprovided at the side surface of the insulating layer 40. The die padunit 52 c and the back surface unit 52 a can be connected to each otherby a through-metal layer 52 d provided inside the insulating layer 40.

As shown in FIG. 1C, an upper surface unit 50 c and the back surfaceunit 50 a of the input terminal 50 can be connected to each other by athrough-metal layer 50 d provided inside the insulating layer 40. Thus,the upper surface unit 50 c and the back surface unit 50 a can beconnected to each other more reliably.

The support substrate 48, the MOSFET 30, the light receiving element 20,and the light emitting element 10 may be covered with a sealing resinlayer 90. Misoperations due to light from the outside can be suppressedby the sealing resin layer 90 being light-shielding. The sealing resinlayer 90 may be epoxy, silicone, etc. The photocoupler is not limited tothe structure shown in FIGS. 1A and 1B and may include anoptically-coupled insulating device including a photocoupler, aphotorelay, etc.

FIG. 2A is a schematic side view of the light emitting element; FIG. 2Bis a schematic plan view of the light emitting element; FIG. 2C is aschematic plan view of the light receiving element; FIG. 2D is aschematic cross-sectional view of the stacked structure along line B-B;and FIG. 2E is a schematic side view of the stacked structure.

As shown in FIG. 2A, a substrate 11 is transparent, has a first surface11 a, and has a second surface 11 b that is on the side opposite to thefirst surface 11 a. A semiconductor stacked body 13 that includes alight emitting layer 12 (the dotted line) is provided on the secondsurface 11 b. The semiconductor stacked body 13 has a stepped portion atthe surface of the semiconductor stacked body 13 on the side opposite tothe substrate 11 side such that the stepped portion is from the frontsurface to a position lower than the light emitting layer 12. Thestepped portion has a bottom surface 13 a.

In the case where the substrate 11 is made of GaAs, the bandgapwavelength of the substrate 11 is about 870 nm. Therefore, thewavelength of emitted light L from the light emitting layer that has aMQW (Multi Quantum Well) structure, etc., may be, for example, longerthan 870 nm and shorter than 1100 nm. In the case where the substrate 11is GaP having a bandgap wavelength of about 500 nm, the wavelength ofthe emitted light G may be 700 to 1100 nm, etc.

The first electrode 14 is provided at the bottom surface 13 a of thestepped portion; and the second electrode 15 is provided at the frontsurface of the semiconductor stacked body 13 other than the steppedportion. In the case where the second electrode 15 covers the lightemitting layer 12 from above, much of the light emitted upward from thelight emitting layer 12 is reflected by the second electrode 15; andoutward emitted light can be reduced. To increase the reflectancefurther, an ohmic bonding metal layer that does not include an alloylayer or a stacked structure of a transparent semiconductor electrodeand a reflective metal layer also may be employed to suppress the lightradiated outward from the upper surface; and a configuration having aminimum resin thickness to suppress light leakage to the outside fromthe sealing resin layer 90 also may be used. The emitted light travelingdownward from the light emitting layer 12 is emitted from a lightemitting region 18 of the second surface 10 b of the light emittingelement 10 and is incident on the light reception region 22 of the lightreceiving element 20. The photovoltaic power can be increased by thelight reception region 22 including, for example, p-n junction regionsconnected in series, etc.

The light reception region 22 of the light receiving element 20 shown inFIG. 2C may be included in the light emitting region 18 of the lightemitting element 10 as viewed from above. Thus, the light receptionregion 22 does not jut from the light emitting element 10. Therefore,the distribution of the photovoltaic power inside the light receptionregion 22 can be averaged; and such a structure is therefore morefavorable. The light receiving element 20 includes the first electrodes26 and 29 that are connected to one conductivity-type layer of the p-njunction and the second electrodes 23 and 27 that are connected to theother conductivity-type layer of the p-n junction.

As shown in FIG. 2D, the emitted light L that is emitted from the lightemitting region 18 and passes through the bonding layer 34 is incidenton the light reception region 22. Because the bonding layer 34 is thin,the emitted light L from the light emitting element 10 is efficientlyincident on the light reception region 22 from the light emitting region18. Also, the light leakage to other control element units can besuppressed; and the stability of the operation increases. The first andsecond electrodes 14 and 15 of the light emitting element 10 areconnectable respectively to the input terminals 50 by bonding wires ofAu, Cu, Ag, etc.

The first electrodes 26 and 29 of the light receiving element 20 areconnectable to the gate electrodes G of the MOSFET 30; and the secondelectrodes 23 and 27 are connectable to the source electrodes S of theMOSFET 30.

In the first embodiment, the MOSFET 30, the light receiving element 20,and the light emitting element 10 are stacked in this order on thesupport substrate 48. Therefore, the planar size and thickness of thepackage decrease; and it is easy to downsize the photocoupler.

In the case of one MOSFET 30, DC load control can be performed. On theother hand, in the case where two MOSFETs 31 and 32 have a common-sourceconnection as shown in FIGS. 1A and 1B, AC load control can beperformed.

FIG. 3A is a schematic cross-sectional view of a photocoupler accordingto a first comparative example prior to wire bonding; and FIG. 3B is aschematic cross-sectional view after wire bonding of the embodiment.

In the comparative example as shown in FIG. 3A, operation regions EERthat include a gate electrode and a source electrode are provided on twosides of a bonding region MMR at the front surface of a MOSFET 130. Abonding wire BW passes through a through-hole 190 a provided at thevicinity of the central axis of a capillary 190 and is connected to theelectrodes by being pressed onto the electrodes. Even in the case wherethe diameter of the bonding wire BW is small and is not more than 30 μm,the outer diameter of the capillary 190 is nearly 200 μm. Therefore,space for the bonding wire BW is necessary on the two sides of thebonding region MMR; and the chip size of the MOSFET 130 becomes large.

Conversely, on the input terminal 50 side of the first surface 30 a ofthe MOSFET 30 in the first embodiment as shown in FIG. 1B, the operationregions ER are not provided; and the side surface of the MOSFET 30 isproximal to the side surface of the light receiving element 20. Byproviding the operation regions ER only on the output terminal 52 side,the chip size of the MOSFET 30 can be reduced. Further, a region insidethe package for bonding the light receiving element 20 and the lightemitting element 10 is unnecessary. Therefore, it is easy to downsizethe photocoupler. As a result, the size of the photocoupler can bereduced to have, for example, a width L2 of 1.35 mm and a length L1 of1.9 mm; and high-density mounting inside the device is possible.

Further, the height of the wires can be low and the sealing resin layerthickness can be thin because the bonding of the bonding wires on thelower surface side can be made first bonding and the bonding of thebonding wires on the upper surface side can be made second bonding; andthe size of the photocoupler can be reduced because the bonding area onthe lower surface side can be small. Moreover, as shown in FIG. 3B, thebonding strength per resin deformation amount is increased and thereliability for resin deformation and peeling is increased because thebonding on the lower surface side is performed firstly; and afterforming the first bonding ball, the wire is lifted perpendicularly andthen moved to be parallel to the element for the second bonding in whichcompression bonding is performed on the upper surface side of elementsat the central portion of the photocoupler. By disposing the bondingwires between the elements to be non-parallel (oblique) to the exteriorform of the device, as shown in FIG. 1A, it is also possible to suppressthe stress due to the expansion and contraction in the vertical andhorizontal directions caused by the thermal deformation of the sealingresin by dispersing the stress in the wire length direction. It is moredesirable for the longer bonding wires to be disposed along directionstoward the center of the device.

FIGS. 4A to 4H are schematic views showing manufacturing processes of anopposed-type photocoupler according to a second comparative example.Namely, FIG. 4A is a partial schematic cross-sectional view of a lightemission-side leadframe; FIG. 4B is a partial schematic plan view of thelight emission-side leadframe; FIG. 4C is a partial schematiccross-sectional view of a light reception-side leadframe; FIG. 4D is apartial schematic plan view of the light reception-side leadframe; FIG.4E is a schematic cross-sectional view of the two leadframes opposingeach other; FIG. 4F is a schematic cross-sectional view of a structurein which the chips are covered with a transparent resin; FIG. 4G is aschematic cross-sectional view of a structure in which the transparentresin and the leadframes are molded with a light-shielding resin; andFIG. 4H is a cross-sectional view after lead-forming.

As shown in FIGS. 4A and 4B, a light emitting element 111 is bonded tothe light emission-side leadframe 100. FIG. 4A is a partial schematiccross-sectional view along line C-C. As shown in FIGS. 4C and 4D, alight receiving element 121 and two MOSFETs 131 and 132 are bonded tothe light reception-side leadframe 200. FIG. 4C is a partial schematiccross-sectional view along line D-D. As shown in FIG. 4E, the lightemission-side leadframe 100 and the light reception-side leadframe 200oppose each other. The light emitting element 111, the light receivingelement 121, and the two MOSFETs 131 and 132 are covered with thetransparent resin 160. The transparent resin 160 is used as a lightpropagation path; and the configuration of the transparent resin 160 isdecided by surface tension, etc.

As shown in FIG. 4G, the transparent resin 160, the light emission-sideleadframe 100, and the light reception-side leadframe 200 are sealed bythe light-shielding resin 170. As shown in FIG. 4H, the photocoupler ismade by performing cutting, forming, etc., for the light emission-sideleadframe 100 and the light reception-side leadframe 200.

In the second comparative example, it is difficult to downsize theplanar size of the package because the light receiving element 121 andthe two MOSFETs 131 and 132 are disposed in a plane. Moreover, thicknessreduction is difficult because the transparent resin 160 and thelight-shielding resin 170 that surrounds the transparent resin 160 arethick. Further, it is difficult to improve the suitability for massproduction for the opposed-type; and cost reductions are not easy.

Conversely, in the first embodiment, thickness reduction and downsizingof the planar size of the package are easy because three levels, i.e.,the light emitting element 10, the light receiving element 20, and theMOSFET 30, are stacked. The number of products per production unit canbe higher than that of the opposed-type that uses leadframes; thesuitability for mass production can be improved; and cost reductions areeasy.

FIG. 5 is a configuration diagram of the photocoupler according to thefirst embodiment.

The light receiving element 20 may further include a control circuit 28.The control circuit 28 is connected to the second electrodes 23 and 27and the first electrodes 26 and 29 of the photodiode array DA. When theoptical signal is ON, the control circuit 28 supplies the current andvoltage of the photodiode array DA to the MOSFETs 30 and 31 (e.g.,switches a connection from the terminals 26 and 29 to the terminals 23and 27 to be open). When the optical signal is OFF, the control circuit28 turns the MOSFETs 30 and 31 OFF by shorting the connection betweenthe gates G and the sources S of the MOSFETs 30 and 31 to remove thestored charge (e.g., shorting the connection from the terminals 26 and29 to the terminals 23 and 27). The simplest configuration of thecontrol circuit 28 is a configuration in which a resistor is connectedbetween the terminals 26 and 29 and the terminals 23 and 27. In the caseof such a configuration, a voltage can be supplied to the gates of theMOSFETs 31 and 32 that have a common-source connection.

The MOSFETs 31 and 32 may be, for example, n-channel enhancement modeMOSFETs. The MOSFETs 31 and 32 are connected to the second electrodes 23and 27 of the photodiode array 20 a. The gates of the MOSFETs 31 and 32are connected to the first electrodes 26 and 29; and drains D of theMOSFETs 31 and 32 are used as the output terminals 52.

When the optical signal is ON, both MOSFETs 31 and 32 are switched ONand are connected via the output terminals 52 to an external circuitthat includes a power supply and a load. On the other hand, when theoptical signal is OFF, both MOSFETs 31 and 32 are switched OFF; and theMOSFETs 31 and 32 are cut off from the external circuit. When thecommon-source connection is used, linear output is possible; and theswitching of analog signals and AC signals is easy.

Normally, parasitic p-n diodes D1 and D2 illustrated by the broken linesexist between the drains and the sources; and one selected from theparasitic diodes D1 and D2 can be used as a portion of the current pathwhen the MOSFETs 31 and 32 are ON.

The amount of heat generated by the MOSFETs 31 and 32 increases duringhigh current operation of the MOSFETs 31 and 32. In such a case, in thecase where the through-metal layer 52 d that is provided inside theinsulating layer 40 is provided below the exothermic units of theMOSFETs 31 and 32, the through-metal layer 52 d can be used as a heatdissipation path; and the thermal resistance can be reduced.

According to the photocoupler of the embodiment, thickness reduction anddownsizing of the planar size are easy. The photocoupler can be widelyused in industrial equipment, office equipment, household appliances,etc. Therefore, the operations of devices that include differentbuilt-in power supplies can be maintained normally and stably.

While certain embodiments have been described, these embodiments havebeen presented by way of example only, and are not intended to limit thescope of the inventions. Indeed, the novel embodiments described hereinmay be embodied in a variety of other forms; furthermore, variousomissions, substitutions and changes in the form of the embodimentsdescribed herein may be made without departing from the spirit of theinventions. The accompanying claims and their equivalents are intendedto cover such forms or modification as would fall within the scope andspirit of the inventions.

What is claimed is:
 1. A photocoupler, comprising: a support substrateincluding an insulating layer, an input terminal, and an outputterminal; a first MOSFET provided on the support substrate, the firstMOSFET having a first surface having a first electrode pad and a firstbonding region; a second MOSFET, having a second surface having a secondelectrode pad and a second bonding region, provided on the supportsubstrate next to the first MOSFET so that the first and secondelectrode pads are located on a same side of the substrate; a lightreceiving element including p-n junction and provided on the first andsecond bonding regions, the light receiving element having a firstsurface and a second surface opposite to the first surface, the firstsurface including a central region, a first outer region located at thefirst bonding region of the first MOSFET, and a second outer regionlocated at the second bonding region at the second MOSFET, a firstelectrode being located at the first and second outer regions, a secondelectrode being located at the first and second outer regions, thesecond surface being insulated from the first and second electrode pads;a light emitting element connected to the input terminal, the lightemitting element having a first surface and a second surface opposite tothe first surface, the first surface including a first electrode and asecond electrode, the second surface having a light emitting region; abonding layer configured to bond the light emitting element to thecentral region of the light receiving element, the bonding layer beingtransparent and insulative; a first bonding wire coupling the firstelectrode pad of the first MOSFET to the first and second electrodes ofthe light receiving element; and a second bonding wire coupling thesecond electrode pad of the second MOSFET to the first and secondelectrodes of the light receiving element, wherein the light emittingelement overlaps a portion of the light receiving element, the firstMOSFET and the second MOSFET.
 2. The photocoupler according to claim 1,wherein the output terminal includes a die pad unit provided at a firstsurface of the insulating layer, and the first and second MOSFETs arebonded to the die pad unit.
 3. The photocoupler according to claim 2,wherein the input terminal includes a back surface unit and a sidesurface unit, and the output terminal includes a back surface unit and aside surface unit, each of the back surface units being provided at asecond surface of the insulating layer on a side opposite to the firstsurface of the insulating layer, each of the side surface units beingprovided at a side surface of the insulating layer.
 4. The photocoupleraccording to claim 3, wherein the die pad unit of the output terminal isconnected to the back surface unit of the output terminal by athrough-metal layer provided inside the insulating layer.
 5. Thephotocoupler according to claim 1, wherein the light receiving elementhas a photodiode array.
 6. A photocoupler, comprising: a light emittingelement having a first surface and a second surface opposite to thefirst surface, the first surface including a first electrode and asecond electrode, the second surface having a light emitting region; alight receiving element having a first surface and a second surfaceopposite to the first surface, the first surface including a centralregion, a first outer region, and a second outer region, a firstelectrode being located at the first and second outer regions, a secondelectrode being located at the first and second outer regions, thecentral region including a p-n junction, the first electrode beingconnected to a first conductivity type layer of the p-n junction, thesecond electrode being connected to a second conductivity type layer ofthe p-n junction; a bonding layer configured to bond the second surfaceof the light emitting element to the central region of the lightreceiving element, the bonding layer being transparent and insulative; afirst MOSFET having a first surface and a second surface opposite to thefirst surface, the first surface having a first electrode pad and afirst bonding region; a second MOSFET having a second surface having asecond electrode pad and a second bonding region; a first bonding wirecoupling the first electrode pad of the first MOSFET to the first andsecond electrodes of the light receiving element; a second bonding wirecoupling the second electrode pad of the second MOSFET to the first andsecond electrodes of the light receiving element; and a supportsubstrate including an insulating layer, input terminals, and an outputterminal, the first and second MOSFETs being provided on the supportsubstrate, the second MOSFET being next to the first MOSFET so that thefirst and second electrode pads are located on a same side of thesupport substrate, the light receiving element being provided on thefirst and second bonding regions wherein the light emitting elementoverlaps a portion of the light receiving element, the first MOSFET andthe second MOSFET.
 7. The photocoupler according to claim 6, wherein theoutput terminal includes a die pad unit provided at a first surface ofthe insulating layer, and the first and second MOSFETs are bonded to thedie pad unit.
 8. The photocoupler according to claim 7, wherein theinput terminal includes a back surface unit and a side surface unit, andthe output terminal includes a back surface unit and a side surfaceunit, each of the back surface units being provided at a second surfaceof the insulating layer on a side opposite to the first surface of theinsulating layer, each of the side surface units being provided at aside surface of the insulating layer.
 9. The photocoupler according toclaim 8, wherein the die pad unit of the output terminal is connected tothe back surface unit of the output terminal by a through-metal layerprovided inside the insulating layer.
 10. The photocoupler according toclaim 6, wherein the light receiving element has a photodiode array.